The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 26, 2011
Filed:
Jan. 17, 2003
Fumio Sakiya, Kannabe-cho, JP;
Yasuhisa Sato, Kannabe-cho, JP;
Tetsuya Nagao, Kannabe-cho, JP;
Toshiyuki Ikeda, Kannabe-cho, JP;
Fumio Sakiya, Kannabe-cho, JP;
Yasuhisa Sato, Kannabe-cho, JP;
Tetsuya Nagao, Kannabe-cho, JP;
Toshiyuki Ikeda, Kannabe-cho, JP;
Rorze Corporation, Hiroshima, JP;
Abstract
In order to automate the positioning at respective ports at the start-up of an equipment in a semiconductor manufacturing equipment equipped with a positioning device and a carrying robot and enhance productivity, 2 points Wand Wat which the circumference of a disc-like objectsuch as a wafer and the locusof a detection means cross are detected, and the center position A of a disc-like object is calculated using the specific point O on the perpendicular bisectorof the section of a line combining 2 points with these and the radius r of the disc-like object. Thereby, the carrying robot could carry out the positioning work and not only the correction of a carrying route but also the reference position teaching at the start-up of equipment could be automated using the result.