Fumio Sakiya

Title: Fumio Sakiya: Innovator in Wafer Storage Technology

Introduction

Fumio Sakiya is a notable inventor based in Kannabe-cho, Japan. He has made significant contributions to the field of wafer storage technology, holding a total of five patents. His innovative designs focus on maintaining clean environments for sensitive materials, which is crucial in various high-tech industries.

Latest Patents

Sakiya's latest patents include a storage container, a shutter opening/closing unit for the storage container, and a wafer stocker that utilizes both the storage container and the shutter unit. The wafer stocker is designed to prevent the inflow of external atmosphere, ensuring that the wafer storage space maintains a desired atmosphere with minimal gas usage. This invention also prevents dust from adhering to the wafer surface. The shutter portion consists of multiple shield plates that align with the intervals between shelf plates in the storage container. By supplying clean gas into the container, a clean atmosphere at a higher pressure than the external environment is achieved. The shutter can be opened and closed independently from the shelf plate that supports the wafer.

Another significant patent involves a container and loader for substrates. This loader is strategically placed at the boundary between a low cleanliness room and a high cleanliness room. It facilitates the transport of dust-free articles between the container and the high cleanliness room. The design includes a movable stage for the container, an opening for transporting the dust-free article, a door for sealing the opening, and a unifying mechanism that connects the container cover and the door when they are in proximity. This innovative loader enhances the efficiency of transferring sensitive materials while maintaining cleanliness.

Career Highlights

Fumio Sakiya is currently employed at Rorze Corporation, where he continues to develop cutting-edge technologies in the field of wafer storage and handling. His work has significantly impacted the efficiency and cleanliness of processes in semiconductor manufacturing and other high-tech applications.

Collaborations

Sakiya collaborates with talented coworkers, including Yasuhisa Sato and Tetsuya Nagao. Their combined expertise contributes to the advancement of innovative solutions in their field.

Conclusion

Fumio Sakiya's contributions to wafer storage technology exemplify the importance of innovation in maintaining clean environments for sensitive materials. His patents reflect a commitment to enhancing efficiency and cleanliness in high-tech industries.