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The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Patent No.:

US 12387959 B1

PDFFull Text
Date of Patent:
Aug. 12, 2025

Filed:

Aug. 29, 2018

Transport device having local purge function

Applicant:

Rorze Corporation, Hiroshima, JP;

Inventors:

Katsunori Sakata, Fukuyama, JP;

Yasuhisa Sato, Ibara, JP;

Hidekazu Okutsu, Fukuyama, JP;

Kenji Hirota, Fukuyama, JP;

Assignee:

Rorze Corporation, , JP;

Attorney:

Merek, Blackmon & Voc

Primary Examiner:

Timothy P Kelly

Int. Cl.
CPC ...
H01L 21/673 (2006.01); F24F 13/06 (2006.01); H01L 21/67 (2006.01); H01L 21/687 (2006.01);
U.S. Cl.
CPC ...
H01L 21/67389 (2013.01); F24F 13/06 (2013.01); H01L 21/67201 (2013.01); H01L 21/67376 (2013.01); H01L 21/67393 (2013.01); H01L 21/68707 (2013.01);
Abstract

The purpose of the present invention is to provide, at low cost, a transport apparatuswhich is capable of transporting a semiconductor wafer W between a FOUPand a processing apparatuswithout exposing a surface to be processed of the semiconductor wafer to an oxidizing atmosphere. This transport apparatusincludes a load portthat has atmosphere replacing function, a transport robotthat has an atmosphere replacing function, an alignerthat has an atmosphere replacing function, and a load lock chamberthat has an atmosphere replacing function. The surface being processed of the semiconductor wafer has the atmosphere replaced locally while the semiconductor wafer is being moved and is being subjected to processes such as positioning.

Find Patent Forward Citations

Sakata, Katsunori. (2025). Transport device having local purge function (U.S. Patent No. 12387959). U.S. Patent and Trademark Office. https://idiyas.com/patent/badge/12387959

Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile

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