Kenji Hirota

Title: Kenji Hirota: Innovator in Semiconductor Transport Technology

Introduction

Kenji Hirota is a notable inventor based in Hiroshima, Japan. He has made significant contributions to the field of semiconductor transport technology. With a total of 2 patents, Hirota's work focuses on improving the efficiency and safety of semiconductor wafer handling.

Latest Patents

Hirota's latest patents include a transport device having a local purge function. The purpose of this invention is to provide a transport apparatus capable of moving a semiconductor wafer between a FOUP and a processing apparatus without exposing the wafer's surface to an oxidizing atmosphere. This innovative transport apparatus features a load port, a transport robot, an aligner, and a load lock chamber, all equipped with atmosphere-replacing functions.

Another significant patent is for a transport apparatus that holds and transports an object along a predetermined track. This apparatus is designed to acquire teaching information of a transport position through normal operations. It includes a position teaching method and a sensor jig that utilizes a transmissive sensor to detect target members during the position teaching operation.

Career Highlights

Kenji Hirota is currently employed at Rorze Corporation, where he continues to develop advanced technologies in semiconductor transport. His work has been instrumental in enhancing the reliability and effectiveness of semiconductor manufacturing processes.

Collaborations

Hirota collaborates with talented coworkers, including Katsunori Sakata and Yasuhisa Sato. Their combined expertise contributes to the innovative projects at Rorze Corporation.

Conclusion

Kenji Hirota's contributions to semiconductor transport technology demonstrate his commitment to innovation and excellence in the field. His patents reflect a deep understanding of the challenges in semiconductor manufacturing and offer practical solutions to enhance efficiency and safety.