Company Filing History:
Years Active: 2019-2025
Title: Innovations of Hidekazu Okutsu
Introduction
Hidekazu Okutsu is a notable inventor based in Fukuyama, Japan. He has made significant contributions to the field of semiconductor transport technology. With a total of 2 patents, his work focuses on improving the efficiency and safety of semiconductor wafer handling.
Latest Patents
One of Okutsu's latest patents is a transport device having a local purge function. The purpose of this invention is to provide a transport apparatus capable of moving a semiconductor wafer between a FOUP and a processing apparatus without exposing the wafer's surface to an oxidizing atmosphere. This innovative transport apparatus includes a load port, a transport robot, an aligner, and a load lock chamber, all equipped with atmosphere replacing functions. The design ensures that the atmosphere around the wafer is replaced locally during movement and processing.
Another significant patent is the load port and load port atmosphere replacing method. This invention provides a load port that can load and unload a substrate while maintaining a purge gas atmosphere inside the substrate storage space. The design features a frame that seals the opening of the substrate storage container and a shutter portion with vertically disposed shielding plates. This allows for the controlled transfer of substrates while ensuring the atmosphere remains stable.
Career Highlights
Okutsu is currently employed at Rorze Corporation, where he continues to innovate in the field of semiconductor technology. His work has been instrumental in advancing the methods used for wafer transport and processing.
Collaborations
He collaborates with talented coworkers, including Katsunori Sakata and Yasuhisa Sato, who contribute to the development of cutting-edge technologies in their field.
Conclusion
Hidekazu Okutsu's contributions to semiconductor transport technology through his patents demonstrate his commitment to innovation and excellence. His work continues to influence the industry and improve processes related to semiconductor manufacturing.
Inventor’s Patent Attorneys refers to legal professionals with specialized expertise in representing inventors throughout the patent process. These attorneys assist inventors in navigating the complexities of patent law, including filing patent applications, conducting patent searches, and protecting intellectual property rights. They play a crucial role in helping inventors secure patents for their innovative creations.