This inventor holds 1 USPTO granted patent and 3 published patent applications. Top assignee: Tokyo Electron Limited. Active years: 2016.
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile
Company Filing History:
Years Active: 2016
Title: Yasuhiro Sugimoto: Innovator in Semiconductor Technology
Introduction
Yasuhiro Sugimoto is a prominent inventor based in Yamanashi, Japan. He has made significant contributions to the field of semiconductor technology, particularly through his innovative patent related to doping methods.
Latest Patents
Yasuhiro Sugimoto holds a patent for a "Doping method, doping apparatus and method of manufacturing semiconductor device." This patent discloses a plasma doping apparatus and method for performing doping on a processing target substrate by implanting dopant ions. The plasma doping method involves generating plasma using a microwave to perform doping processing on the substrate held within a processing container. Additionally, it includes an annealing process for the substrate that has undergone plasma doping.
Career Highlights
Sugimoto is associated with Tokyo Electron Limited, a leading company in the semiconductor manufacturing equipment industry. His work has been instrumental in advancing the techniques used in semiconductor device fabrication.
Collaborations
He has collaborated with notable coworkers, including Masahiro Oka and Masahiro Horigome, contributing to various projects within the company.
Conclusion
Yasuhiro Sugimoto's innovative work in semiconductor technology, particularly his patent on plasma doping methods, showcases his expertise and commitment to advancing the field. His contributions continue to influence the industry and pave the way for future innovations.
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile