Yasuhiro Otagiri

Title: Yasuhiro Otagiri: Innovator in Sputtering Technology

Introduction

Yasuhiro Otagiri is a notable inventor based in Yamanashi, Japan. He has made significant contributions to the field of sputtering technology, which is essential in various manufacturing processes, particularly in the semiconductor industry. His innovative approach has led to the development of a unique sputtering method and apparatus.

Latest Patents

Otagiri holds a patent for a sputtering method and sputtering apparatus. This method involves performing a pre-sputtering process by emitting sputter particles from a target within a sputtering apparatus. The target is shielded by a shutter that can open and close, allowing for precise control during the sputtering process. After the pre-sputtering, a main-sputtering is conducted, where the sputter particles are deposited on a substrate. The method allows for the repeated performance of pre-sputtering and main-sputtering, with the shutter position being adjusted to change the shielding portion's alignment with the target.

Career Highlights

Otagiri is currently employed at Tokyo Electron Limited, a leading company in the semiconductor manufacturing equipment industry. His work has been instrumental in advancing sputtering technologies, which are critical for producing high-quality semiconductor devices.

Collaborations

Throughout his career, Otagiri has collaborated with talented individuals such as Kazunaga Ono and Atsushi Gomi. These collaborations have fostered innovation and contributed to the development of advanced sputtering techniques.

Conclusion

Yasuhiro Otagiri's contributions to sputtering technology exemplify the impact of innovative thinking in the semiconductor industry. His patent and work at Tokyo Electron Limited highlight his role as a key figure in advancing manufacturing processes.