Yasuhiro Morikawa

USPTO Granted Patents = 5 (Patent Applications = 2)

Average Co-Inventor Count = 3.4

ph-index = 2

Forward Citations = 7(Granted Patents)

Company Filing History:

Matsushita Electric Industrial Co., Ltd.

patents

1 out of 832,680

Other

patents

Years Active: 2002-2025

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5 patents (USPTO):Sort by Forward CitationsExplore Patents

1. 12469711 - Etching method (2025-11-11),

2. 12217969 - Silicon dry etching method (2025-02-04),

3. 12020942 - Etching method (2024-06-25),

4. 6828247 - Method for etching organic film, method for fabricating semiconductor device and pattern formation method (2004-12-07),

5. 6451620 - Method for etching organic film, method for fabricating semiconductor device and pattern formation method (2002-09-17),

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2 patents pending:

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