Koshi, Japan

Yasuhiro Kuga


Average Co-Inventor Count = 3.6

ph-index = 1

Forward Citations = 13(Granted Patents)


Location History:

  • Kumamoto, JP (2003)
  • Koshi, JP (2014 - 2023)

Company Filing History:


Years Active: 2003-2023

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4 patents (USPTO):Explore Patents

Title: Yasuhiro Kuga: Innovator in Substrate Processing Technology

Introduction

Yasuhiro Kuga is a prominent inventor based in Koshi, Japan. He has made significant contributions to the field of substrate processing technology, holding a total of 4 patents. His work focuses on developing advanced apparatuses and methods for processing substrates, which are essential in various manufacturing processes.

Latest Patents

Kuga's latest patents include a substrate processing apparatus and a heat treatment apparatus. The substrate processing apparatus is designed to perform heat processing on substrates with films formed on them. It features a heat processing unit that includes a heater, a chamber, a gas ejector, an outer peripheral exhauster, and a central exhauster. This innovative design allows for efficient processing of substrates by controlling the heat and gas flow effectively.

The heat treatment apparatus is intended for heating substrates with coating films in a treatment container. It consists of a mount for the substrate, a heating part, a suction pipe, and a collection container. This apparatus is designed to collect sublimates during the treatment process, enhancing the efficiency of heat treatment operations.

Career Highlights

Yasuhiro Kuga has dedicated his career to advancing substrate processing technologies. His work at Tokyo Electron Limited has positioned him as a key player in the industry. His inventions have not only improved processing efficiency but have also contributed to the overall advancement of semiconductor manufacturing technologies.

Collaborations

Kuga has collaborated with notable colleagues, including Yukinobu Otsuka and Shinsuke Takaki. These collaborations have fostered innovation and have led to the development of cutting-edge technologies in substrate processing.

Conclusion

Yasuhiro Kuga's contributions to substrate processing technology are noteworthy. His innovative patents and collaborative efforts have significantly impacted the field, making him a respected figure in the industry. His work continues to influence advancements in manufacturing processes.

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