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For the Inventor, By the Inventor

Yokohama, Japan

Yasuhiro Hidaka

USPTO Granted Patents = 12

Average Co-Inventor Count = 1.6

ph-index = 2

Forward Citations = 9(Granted Patents)


Location History:

  • Fujisawa, JP (2020 - 2022)
  • Kanagawa, JP (2022)
  • Yokohama, JP (2021 - 2024)

Company Filing History:

goldMedal12 out of 131,744 
 
Samsung Electronics Co., Ltd.
 patents

Years Active: 2020-2025

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12 patents (USPTO):Explore Patents
1. 12510491 - Apparatus for inspecting surface of object (2025-12-30),
2. 12345626 - Ellipsometer and apparatus for inspecting semiconductor device including the ellipsometer (2025-07-01),
3. 12339223 - Measuring apparatus and testing apparatus having the same (2025-06-24),
4. 12228499 - Pupil ellipsometry measurement apparatus and method and method of fabricating semiconductor device using the pupil ellipsometry measurement method (2025-02-18),
5. 11885608 - Ellipsometer and inspection device for inspecting semiconductor device having the same (2024-01-30),
6. 11761906 - Optical device (2023-09-19),
7. 11604136 - Pupil ellipsometry measurement apparatus and method and method of fabricating semiconductor device using the pupil ellipsometry measurement method (2023-03-14),
8. 11493322 - Ellipsometer (2022-11-08),
9. 11314073 - Lighting device and inspection apparatus having the same (2022-04-26),
10. 11193882 - Ellipsometer and inspection device for semiconductor device (2021-12-07),
11. 11037283 - Inspecting apparatus based on hyperspectral imaging (2021-06-15),
12. 10724899 - Spectrometer optical system, semiconductor inspection apparatus including the same and method of manufacturing semiconductor device using the apparatus (2020-07-28),

Title: Yasuhiro Hidaka: Innovator in Semiconductor Inspection Technology

Introduction

Yasuhiro Hidaka is a prominent inventor based in Yokohama, Japan. He has made significant contributions to the field of semiconductor inspection technology, holding a total of 11 patents. His innovative work has advanced the capabilities of ellipsometry and measurement apparatuses used in the semiconductor industry.

Latest Patents

Hidaka's latest patents include an ellipsometer and an apparatus for inspecting semiconductor devices. The ellipsometer is designed to improve throughput by calculating ellipsometry coefficients (Ψ, Δ) even when using a light source with a wide wavelength band and a spectrometer. This device features a polarizing optical element unit that separates reflected light into two orthogonal polarization components. It also includes an analyzer unit that allows these components to interfere, forming concentric circle interference fringes detected by an image detector. Additionally, the processing circuitry calculates the ellipsometry coefficients from these fringes. Another notable patent is a measuring apparatus that incorporates a first beam splitter, a diffraction grating, and a time domain detector. This apparatus is capable of detecting electromagnetic waves and obtaining the magnitude and direction of the electric field through Fourier transformation.

Career Highlights

Yasuhiro Hidaka is currently employed at Samsung Electronics Co., Ltd., where he continues to develop innovative technologies in semiconductor inspection. His work has been instrumental in enhancing the precision and efficiency of measurement techniques in this critical field.

Collaborations

Hidaka has collaborated with notable colleagues, including Mitsunori Numata and Jaehwang Jung. Their combined expertise has contributed to the advancement of technologies in semiconductor inspection.

Conclusion

Yasuhiro Hidaka's contributions to semiconductor inspection technology through his patents and collaborations highlight his role as a leading inventor in the field. His innovative solutions continue to shape the future of semiconductor measurement and inspection.

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