The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jan. 30, 2024
Filed:
Jul. 02, 2021
Samsung Electronics Co., Ltd., Suwon-si, KR;
Yasuhiro Hidaka, Yokohama, JP;
SAMSUNG ELECTRONICS CO., LTD., Suwon-si, KR;
Abstract
An ellipsometer is provided. The ellipsometer includes: a polarizing optical element, comprising a prism, that is configured to split reflected light into two linearly polarized components of light having polarization directions orthogonal to each other, the reflected light generated by reflecting illuminated light, including linearly polarized light that is polarized in one direction, from a measurement surface of a sample; an interference member, comprising at least one body, that is configured to form at least one interference fringe in which the two linearly polarized components of light interfere with each other in directions different from the polarization directions; an image detector configured to detect the at least one interference fringe; and an analysis device including at least one processor, the analysis device configured to calculate ellipsometry coefficients Ψ and Δ based on the at least one interference fringe that is detected.