Location History:
- Kamikyo-ku, JP (2006)
- Kyoto, JP (1990 - 2009)
Company Filing History:
Years Active: 1990-2009
Title: Yasufumi Koyama: Innovator in Substrate Processing Technologies
Introduction
Yasufumi Koyama is a distinguished inventor based in Kyoto, Japan, known for his significant contributions to substrate processing technologies. With an impressive portfolio of 14 patents, Koyama has played a pivotal role in advancing the field, particularly in photolithography and substrate treatment applications.
Latest Patents
Koyama's latest innovations include two significant patents. The first is a **substrate treating apparatus** designed to heat substrates promptly after exposure while minimizing thermal damage to the exposing apparatus. This system incorporates heating modules specifically for exposed substrates, with an innovative interface block that features a transport mechanism. This arrangement enables the efficient transfer of substrates to the heating modules, ensuring they re covered immediately after exposure.
The second patent is for a **substrate processing apparatus** that enhances the photolithography process through a dual functionality of resist coating and development. This apparatus features an inspection block equipped with an inspection unit and a transport robot. It efficiently manages the transport of substrates for inspection while improving throughput by allowing non-inspected substrates to bypass the inspection process seamlessly.
Career Highlights
Koyama's career is marked by his dedication to innovation at Dainippon Screen Mfg. Co., Ltd., a company that excels in providing advanced imaging and printing solutions. His work is critical to the ongoing development of technologies that streamline processes in semiconductor manufacturing and other industries that rely on precise substrate processing.
Collaborations
Throughout his career, Koyama has collaborated with various esteemed colleagues, including Kenji Hashinoki and Akira Kuwabara. These partnerships have enabled the fusion of diverse ideas and expertise, thereby enhancing the ingenuity and effectiveness of the inventions developed.
Conclusion
Yasufumi Koyama stands out as a leading figure in the field of substrate processing. His inventive spirit and commitment to excellence have resulted in innovative patents that continue to push the boundaries of technology. As a vital contributor at Dainippon Screen Mfg. Co., Ltd., Koyama's work not only elevates the company’s standing in the industry but also sets a benchmark for future innovations in substrate treatment and photolithography.
Inventor’s Patent Attorneys refers to legal professionals with specialized expertise in representing inventors throughout the patent process. These attorneys assist inventors in navigating the complexities of patent law, including filing patent applications, conducting patent searches, and protecting intellectual property rights. They play a crucial role in helping inventors secure patents for their innovative creations.