Location History:
- Hatano, JP (1992)
- Machida, JP (1992 - 1995)
- Hadano, JP (1991 - 1998)
- Utsunomiya, JP (1998 - 2004)
Company Filing History:
Years Active: 1991-2004
Title: **Innovations of Yasuaki Fukuda: Pioneering Patents in Exposure Apparatus Technology**
Introduction
Yasuaki Fukuda, a prominent inventor based in Hadano, Japan, has made significant contributions to the field of optical engineering through his 27 patents. His work primarily focuses on exposure apparatuses and device manufacturing methods, crucial for advancements in lithography and semiconductor technologies.
Latest Patents
Fukuda's recent innovations include two noteworthy patents:
1. **Exposure Apparatus and Device Manufacturing Method** - This patent discloses an exposure apparatus that features an optical element, a gas supplying unit, and an organic compound decomposition mechanism. This unique structure effectively prevents the adhesion of organic compounds to the optical element, eliminating the need for multiple filters in combination.
2. **Exposure Apparatus for Synchrotron Radiation Lithography** - This device is designed to transfer a mask pattern onto a substrate using radiation light from a synchrotron radiation light source. It contains a first mirror that collects the radiation light and a second mirror that reflects it onto the mask. The configuration of these mirrors, with specific concave and convex shapes, optimizes the projection of light rays enabling high-precision lithography.
Career Highlights
Fukuda has established his career at Canon Kabushiki Kaisha, a leading company renowned for its innovations in imaging and optical technologies. His work has not only advanced the technical capabilities of their products but has also positioned the company at the forefront of lithographic advancements.
Collaborations
Throughout his professional journey, Fukuda has collaborated with esteemed coworkers such as Yutaka Watanabe and Takashi Iizuka. Together, they have worked on developing cutting-edge technologies that have significantly impacted the industry.
Conclusion
Yasuaki Fukuda's impressive portfolio of patents illustrates his dedication to innovation in exposure apparatus technology. His contributions continue to influence the fields of optics and semiconductor manufacturing, ensuring that Canon Kabushiki Kaisha remains a key player in advancements within the industry.
Inventor’s Patent Attorneys refers to legal professionals with specialized expertise in representing inventors throughout the patent process. These attorneys assist inventors in navigating the complexities of patent law, including filing patent applications, conducting patent searches, and protecting intellectual property rights. They play a crucial role in helping inventors secure patents for their innovative creations.