Yasuaki Amano

Title: Yasuaki Amano: Innovator in Wafer Support Technology

Introduction

Yasuaki Amano is a prominent inventor based in Munich, Germany. He is known for his contributions to the field of semiconductor technology, particularly in wafer support systems. His innovative approach has led to advancements that enhance the efficiency and precision of wafer handling in lithography processes.

Latest Patents

Yasuaki Amano holds a patent for a wafer support system, which includes a wafer support device and a dicing frame. The design features a bottom plate and a top plate, where the top plate provides a support surface for the wafer. The bottom plate has a maximum diameter larger than that of the top plate, creating a repository for the dicing frame. This innovative structure allows the dicing frame to sink below the upper surface of the wafer, improving the overall functionality of the system.

Career Highlights

Amano is currently employed at Suss Microtec Lithography GmbH, a company renowned for its cutting-edge lithography equipment. His work at Suss Microtec has positioned him as a key player in the development of advanced semiconductor manufacturing technologies. His expertise in wafer support systems has contributed significantly to the company's success in the industry.

Collaborations

Throughout his career, Yasuaki Amano has collaborated with notable colleagues, including Sven Hansen and Lennert Schwart. These partnerships have fostered a collaborative environment that encourages innovation and the sharing of ideas within the field of semiconductor technology.

Conclusion

Yasuaki Amano's contributions to wafer support technology exemplify his commitment to innovation in the semiconductor industry. His patent and work at Suss Microtec highlight his role as a leading inventor in this critical field.