Yanli Li

Title: Yanli Li - Innovator in Tip-to-Tip Graphic Preparation Method

Introduction

Yanli Li is a prominent inventor based in Shanghai, China. She has made significant contributions to the field of graphic preparation methods, particularly with her innovative approach to Tip-to-Tip patterns. Her work is characterized by a focus on efficiency and precision in lithography techniques.

Latest Patents

Yanli Li holds a patent for a method titled "Tip-to-Tip Graphic Preparation Method." This invention discloses a process that involves providing a substrate and sequentially forming various layers, including a layer to be etched, hard mask layers, a sacrificial layer, a dielectric layer, and a photoresist layer. The method utilizes EUV lithography to create a first patterned photoresist layer with a Tip-to-Tip pattern, which is then transferred to the hard mask layer through etching. This process is repeated to form a second pattern, ultimately allowing for the creation of small-sized Tip-to-Tip patterns with a halved period. The efficiency of this method lies in its requirement of only two EUV lithography steps, significantly reducing the number of lithography layers needed.

Career Highlights

Yanli Li is currently employed at Shanghai IC R&D Center Co., Ltd. Her work at this company has positioned her as a key player in the development of advanced graphic preparation techniques. With her innovative mindset, she continues to push the boundaries of what is possible in her field.

Collaborations

Yanli Li collaborates with talented individuals such as Yushu Yang and Qiang Wu. These partnerships enhance her research and development efforts, contributing to the advancement of technology in graphic preparation methods.

Conclusion

Yanli Li's contributions to the field of graphic preparation methods, particularly through her Tip-to-Tip pattern preparation method, showcase her innovative spirit and dedication to advancing technology. Her work not only highlights her expertise but also sets a foundation for future developments in the industry.