Company Filing History:
Years Active: 2022-2023
Title: Yan-Zi Lu: Innovator in Sputtering Technology
Introduction
Yan-Zi Lu is a prominent inventor based in Hsinchu, Taiwan. He has made significant contributions to the field of sputtering technology, holding 2 patents that showcase his innovative approach to improving sputtering processes.
Latest Patents
His latest patents include a sputtering target assembly designed to prevent overetch of the backing plate. This invention features a target assembly that includes a backing plate with an aperture formed therein. The target is bonded to the front surface of the backing plate, and the aperture is strategically placed to ensure that a portion of the target, predicted to have the highest etching rate during sputtering, seals the first end of the aperture. This design enhances the efficiency and effectiveness of the sputtering process.
Career Highlights
Yan-Zi Lu is currently employed at Taiwan Semiconductor Manufacturing Company Limited, where he continues to develop innovative solutions in semiconductor manufacturing. His work has been instrumental in advancing the technology used in the industry.
Collaborations
He collaborates with talented coworkers, including Chen-Fang Chung and Wen-Cheng Cheng, who contribute to the innovative environment at their workplace.
Conclusion
Yan-Zi Lu's contributions to sputtering technology reflect his dedication to innovation and excellence in the semiconductor field. His patents not only demonstrate his expertise but also pave the way for advancements in manufacturing processes.