Yan-Yi Lu

Title: Yan-Yi Lu: Innovator in Wafer Cleaning Technology

Introduction

Yan-Yi Lu is a prominent inventor based in Taoyuan County, Taiwan. He has made significant contributions to the field of semiconductor manufacturing, particularly in wafer cleaning technology. With a total of 2 patents to his name, Lu continues to push the boundaries of innovation in this critical area.

Latest Patents

Yan-Yi Lu's latest patents include a "Wafer cleaning device and method thereof" and a "Wafer cleaning device." Both inventions focus on improving the efficiency of wafer cleaning processes. The first patent describes a wafer cleaning device that comprises a wafer stage for holding a wafer with a surface to be washed. It features a first nozzle positioned above the wafer and a second nozzle also positioned above the wafer. The design specifies that the first height between the first nozzle and the surface is shorter than the second height between the second nozzle and the surface. This innovative approach enhances the cleaning process, ensuring optimal results.

Career Highlights

Lu is currently employed at United Microelectronics Corporation, a leading company in the semiconductor industry. His work at UMC has allowed him to collaborate with other talented professionals and contribute to groundbreaking advancements in wafer cleaning technology.

Collaborations

Some of Yan-Yi Lu's notable coworkers include Hsin-Ting Tsai and Cheng-Hung Yu. Their collaborative efforts have further strengthened the innovative capabilities within their team.

Conclusion

Yan-Yi Lu stands out as a key figure in the realm of wafer cleaning technology. His patents reflect a commitment to enhancing semiconductor manufacturing processes. Through his work at United Microelectronics Corporation, he continues to make a lasting impact in the industry.