Yan Du

Title: Yan Du - Innovator in High Dielectric Etching Technologies

Introduction

Yan Du is a prominent inventor based in Santa Clara, CA (US), known for his contributions to the field of semiconductor manufacturing. He holds a total of 4 patents, showcasing his expertise in etching high dielectric constant materials.

Latest Patents

Yan Du's latest patents include innovative methods for etching high-k dielectric materials. One notable patent describes a method for etching a high k dielectric material in a plasma etch reactor. This method involves plasma etching the material with a first plasma gas reactant mixture that includes BCl. The high k dielectric material may consist of AlO in a stack with a silicon layer. The etching process may also incorporate a passivation gas, such as CH, and a diluent gas like a noble gas, for example, He. In some implementations, the etching is performed using a reactive ion etch process.

Another significant patent focuses on a device and method for etching flash memory gate stacks that comprise high-k dielectric materials. This method allows for the etching of a wafer to form devices that include a high-k dielectric layer. The process includes etching an upper conductive material layer in a first plasma chamber at a low cathode temperature, transferring the wafer to a second chamber without breaking vacuum, and etching a high-k dielectric layer in the second chamber. The wafer is then transferred back to the first plasma chamber without breaking vacuum, where a lower conductive material layer is etched at a low cathode temperature. In one implementation, the high-k dielectric etch is performed using a plasma etch with a high temperature cathode, while in another, a reactive ion etch is utilized.

Career Highlights

Yan Du is currently employed at Applied Materials, Inc., a leading company in the semiconductor equipment industry. His work focuses on advancing etching technologies that are crucial for the production of modern electronic devices.

Collaborations

Yan collaborates with talented professionals in his field, including Meihua Shen and Shashank C Deshmukh, who contribute to the innovative projects at Applied Materials, Inc.

Conclusion

Yan Du's contributions to the field of semiconductor manufacturing through his patents and innovative methods have significantly impacted the industry. His work continues to pave the way for advancements in high dielectric etching technologies.