Company Filing History:
Years Active: 2006
Title: The Innovative Mind of Y Y Chang: Revolutionizing Rapid Thermal Annealing
Introduction
Y Y Chang, an inventive mind based in Hsinchu, Taiwan, has made significant strides in the field of semiconductor manufacturing. With a focus on improving the efficiency and reliability of wafer processing, Chang holds a patent that showcases his innovative approach to rapid thermal annealing.
Latest Patents
Y Y Chang's sole patent centers around a novel rapid thermal annealing (RTA) process. This invention introduces a method for RTA equipment that incorporates a pyrometer, enabling accurate measurement of operational parameters, such as temperature. The process involves two RTA steps for a wafer: first, measuring the temperature and comparing it against a predefined reference range. If the measured temperature falls within this range, the process continues to the second step. However, if the temperature is outside the acceptable limits, the equipment automatically shuts off, allowing the wafer to be transferred to another RTA unit for completion. This innovation optimizes wafer processing and enhances quality control.
Career Highlights
Y Y Chang is affiliated with Macronix International Co., Ltd., a notable player in the semiconductor industry, where he has contributed his expertise to the advancement of RTA processes. This position has allowed him to collaborate with other talented individuals in the field, honing his skills and enhancing his contributions to technology.
Collaborations
Throughout his career, Y Y Chang has worked closely with professionals such as Shih-Liang Chou and L H Lee. Their collective knowledge and experience have facilitated a collaborative environment that fosters innovation and problem-solving in semiconductor processing technologies.
Conclusion
Y Y Chang's innovative approach to rapid thermal annealing exemplifies the critical role of inventors in advancing technology. His patent not only highlights his ingenuity but also underscores the importance of precise operational parameters in semiconductor manufacturing. As he continues to work with industry leaders at Macronix International Co., Ltd., Chang's contributions will undoubtedly play a vital role in shaping the future of wafer processing techniques.