Xueping Ru

Title: The Innovative Contributions of Xueping Ru

Introduction

Xueping Ru is a notable inventor based in Flanders, NJ (US). He has made significant contributions to the field of acoustic metrology, particularly in the detection of voids in advanced interconnect technologies. His work is essential for the advancement of 3-D integration techniques.

Latest Patents

Xueping Ru holds a patent for "Non-destructive acoustic metrology for void detection." This innovative method utilizes laser-based acoustic techniques to generate broadband acoustic waves that propagate within Through Silicon Vias (TSVs). An optical interferometer is employed to detect surface displacements caused by these acoustic waves, providing critical information about the structure's dimensions and any irregularities, such as voids. The system is designed for quick measurements, typically taking only a few seconds per site, making it suitable for in-line process monitoring.

Career Highlights

Throughout his career, Xueping Ru has worked with prominent organizations, including Rudolph Technologies, Inc. and the University of Colorado. His experience in these institutions has allowed him to refine his expertise in acoustic metrology and contribute to the development of advanced technologies.

Collaborations

Xueping Ru has collaborated with several professionals in his field, including Manjusha Mehendale and Michael Kotelyanskii. These collaborations have further enhanced his research and innovation capabilities.

Conclusion

Xueping Ru's contributions to the field of acoustic metrology and his innovative patent demonstrate his commitment to advancing technology in 3-D integration. His work continues to influence the industry and pave the way for future innovations.