Xuehui Yin

Title: Innovations by Xuehui Yin in Charged-Particle Beam Technology

Introduction

Xuehui Yin is an accomplished inventor based in Union City, CA (US). He has made significant contributions to the field of charged-particle beam technology. His innovative work has led to the development of a patent that enhances the precision of charged-particle beam systems.

Latest Patents

Xuehui Yin holds a patent for "Systems and methods for focusing charged-particle beams." This patent describes systems and methods for irradiating a sample with a charged-particle beam. The charged-particle beam system includes a stage that holds a sample and is movable in at least one of the X-Y-Z axes. Additionally, the system features a position sensing system to determine the lateral and vertical displacement of the stage. A beam deflection controller applies signals to deflect the primary charged-particle beam and adjust its focus, compensating for any displacements. The signals utilized have a high bandwidth, ranging from 10 kHz to 50 kHz and 50 kHz to 200 kHz, respectively.

Career Highlights

Xuehui Yin is currently employed at ASML Netherlands B.V., a leading company in the field of semiconductor manufacturing equipment. His work at ASML has allowed him to further develop his expertise in charged-particle beam technology.

Collaborations

Xuehui has collaborated with notable colleagues, including Ying Luo and Zhonghua Dong. These collaborations have contributed to the advancement of technology in their respective fields.

Conclusion

Xuehui Yin's innovative contributions to charged-particle beam technology demonstrate his expertise and commitment to advancing scientific research. His patent reflects a significant step forward in the precision of charged-particle beam systems.