Company Filing History:
Years Active: 2000-2001
Title: Xu-Jin Wang: Innovator in Polishing Apparatus Technology
Introduction
Xu-Jin Wang is a notable inventor based in Ayase, Japan. He has made significant contributions to the field of polishing apparatus technology, holding a total of 3 patents. His work focuses on improving the mass producibility of wafers, which is crucial in various manufacturing processes.
Latest Patents
Wang's latest patents include innovative designs for carriers and polishing apparatus. One of his patents describes a carrier and a polishing apparatus that enhance the mass producibility of wafers. This design features a retainer ring made from a soft material, with a rubber sheet bonded to the bottom surface of the carrier body to define a pressure chamber. The retainer ring's thickness is carefully calibrated to match the combined thickness of the margin block and the wafer.
Another patent details a carrier that includes a disk-shaped body with fluid circulation holes. This design incorporates a pliable diaphragm portion and a ring-shaped edge that projects downward, ensuring effective communication with the fluid circulation holes. The back surface of the pliable sheet defines a pressure chamber, which is essential for the operation of the apparatus.
Career Highlights
Xu-Jin Wang is currently employed at Speedfam Co Ltd, where he continues to develop innovative solutions in the field of polishing technology. His expertise and inventions have positioned him as a key figure in the industry.
Collaborations
Wang collaborates with talented coworkers, including Misuo Sugiyama and Hideo Tanaka. Their combined efforts contribute to the advancement of technology in their field.
Conclusion
Xu-Jin Wang's contributions to polishing apparatus technology demonstrate his commitment to innovation and excellence. His patents reflect a deep understanding of the challenges in wafer production and offer practical solutions to enhance efficiency.