Xinhe Jerry Lim

Title: Innovations of Xinhe Jerry Lim

Introduction

Xinhe Jerry Lim is a notable inventor based in Singapore, SG. He has made significant contributions to the field of substrate processing technology. His innovative approach has led to the development of a unique substrate processing method that enhances efficiency and effectiveness in various applications.

Latest Patents

Xinhe Jerry Lim holds a patent for a substrate processing method and substrate processing apparatus. This method is performed in a chamber of a substrate processing apparatus, which includes a substrate support, an upper electrode, and a gas supply port. The process involves several steps, including providing the substrate on the substrate support, supplying a first processing gas into the chamber, and generating plasma from the first processing gas using a combination of RF and negative DC voltage signals. The method is designed to optimize the processing time, with a focus on efficiency.

Career Highlights

Xinhe Jerry Lim is currently associated with Tokyo Electron Limited, a leading company in the semiconductor manufacturing equipment industry. His work at the company has allowed him to apply his innovative ideas in a practical setting, contributing to advancements in substrate processing technologies.

Collaborations

Xinhe has collaborated with esteemed colleagues such as Seiichi Watanabe and Kazuki Narishige. Their combined expertise has fostered a productive environment for innovation and development in their field.

Conclusion

Xinhe Jerry Lim's contributions to substrate processing technology exemplify the spirit of innovation. His patent and work at Tokyo Electron Limited highlight his commitment to advancing technology in the semiconductor industry.