Xin Meng

Title: Innovations by Inventor Xin Meng

Introduction

Xin Meng is an accomplished inventor based in Ontario, CA (US). He has made significant contributions to the field of semiconductor processing. His innovative work focuses on enhancing cleaning techniques within multi-station semiconductor processing chambers.

Latest Patents

Xin Meng holds a patent for "Apparatuses and techniques for cleaning a multi-station semiconductor processing chamber." This patent describes systems and methods for redirecting cleaning chemistry flows within a multi-station semiconductor processing chamber. The technology involves directing a cleaning chemistry flow, such as plasma from a remote plasma generator, onto a hub of an indexer that is centrally mounted within the chamber. The hub is designed with features that redirect the cleaning chemistry flows radially outward. By rotating the hub or adjusting the relative elevational positions between the hub and the cleaning chemistry inlet, the cleaning chemistry can be directed into various regions of the chamber. This innovation allows for a more thorough and complete cleaning process.

Career Highlights

Xin Meng is currently employed at Lam Research Corporation, where he continues to develop cutting-edge technologies in semiconductor processing. His work has been instrumental in improving the efficiency and effectiveness of cleaning processes in the industry.

Collaborations

Xin collaborates with talented professionals, including his coworker Sreeram Sonti, who brings valuable insights and expertise to their projects.

Conclusion

Xin Meng's innovative contributions to semiconductor processing demonstrate his commitment to advancing technology in this critical field. His patent for cleaning techniques showcases his ability to solve complex challenges and improve industry standards.