Xiaozhou Che

Title: Innovations by Xiaozhou Che

Introduction

Xiaozhou Che is an accomplished inventor based in Sunnyvale, CA. He has made significant contributions to the field of sensor technology and vapor monitoring. With a total of 4 patents to his name, Che continues to push the boundaries of innovation in his industry.

Latest Patents

One of his latest patents is titled "Sensor assembly and methods of vapor monitoring in process chambers." This invention involves methods and systems for monitoring film thickness using a sensor assembly. The assembly includes a process chamber with a chamber body, a substrate support, and a lid. The sensor assembly is strategically coupled to both the chamber body and the lid, featuring one or more apertures for sensor placement.

Another notable patent is "Method and chamber for backside physical vapor deposition." This method focuses on depositing a backside film layer on a substrate. It involves loading a substrate onto a support, depositing target material from a sputter target, and applying an RF bias to an electrode during the deposition process. This innovative approach enhances the efficiency of film deposition in processing chambers.

Career Highlights

Xiaozhou Che is currently employed at Applied Materials, Inc., a leading company in the semiconductor and display industries. His work at Applied Materials has allowed him to develop cutting-edge technologies that are essential for modern manufacturing processes.

Collaborations

Throughout his career, Che has collaborated with talented individuals such as Jothilingam Ramalingam and Yong Cao. These collaborations have fostered a creative environment that encourages innovation and the development of new technologies.

Conclusion

Xiaozhou Che's contributions to sensor technology and vapor monitoring are noteworthy. His patents reflect a commitment to advancing the field and improving manufacturing processes. As he continues to innovate, his work will undoubtedly have a lasting impact on the industry.