Company Filing History:
Years Active: 2013-2016
Title: Innovations of Xiaoru Wang in Semiconductor Technology
Introduction
Xiaoru Wang is a notable inventor based in Fremont, CA, who has made significant contributions to the field of semiconductor technology. With a total of three patents to his name, Wang's work focuses on advanced methods for laser thermal annealing, which are crucial for the manufacturing of high-performance electronic devices.
Latest Patents
Wang's latest patents include innovative techniques for non-melt thin-wafer laser thermal annealing methods. These methods allow for high-temperature annealing of one side of a thin semiconductor wafer without damaging or overheating heat-sensitive electronic device features on the opposite side or embedded within the wafer. The annealing process is conducted at temperatures below the melting point of the wafer, ensuring that no significant dopant redistribution occurs. This technology is particularly useful for activating dopants and forming ohmic contacts.
Another significant patent involves two-beam laser annealing with improved temperature performance. This system minimizes wafer surface temperature variations during the laser annealing process. It utilizes first and second laser beams, representing preheat and anneal laser beams, to achieve uniform anneal temperature across the wafer surface. The preheat laser beam raises the wafer surface temperature close to the annealing temperature, while the anneal laser beam completes the process. This innovative approach also includes measuring reflectivity maps of the wafer surface to select optimal intensities, thereby minimizing edge damage or slip generation.
Career Highlights
Xiaoru Wang is currently employed at Ultratech, Inc., where he continues to develop cutting-edge technologies in semiconductor processing. His expertise in laser annealing methods has positioned him as a key player in advancing the efficiency and effectiveness of semiconductor manufacturing.
Collaborations
Wang collaborates with talented individuals in his field, including Xiaohua Shen and Yun Yu Wang, who contribute to the innovative projects at Ultratech, Inc.
Conclusion
Xiaoru Wang's contributions to semiconductor technology through his patents and work at Ultratech, Inc. highlight his role as a leading inventor in the industry. His innovative methods for laser thermal annealing are paving the way for advancements in electronic device manufacturing.