Company Filing History:
Years Active: 2022
Title: Innovations of Xiaoli Lu in Sputtering Technology
Introduction
Xiaoli Lu is a prominent inventor based in Chigasaki, Japan. She has made significant contributions to the field of sputtering technology, particularly through her innovative patent. Her work focuses on enhancing the efficiency of sputtering targets, which are essential in various manufacturing processes.
Latest Patents
Xiaoli Lu holds a patent for a sputtering target and a method of producing it. The patent aims to provide a sputtering target with improved sputtering efficiency. The invention features a cobalt target with a sputtering surface and a purity of 99.95 wt % or more. The patent specifies that the intensity ratio of X-ray diffraction peaks corresponding to various planes of a hexagonal close-packed lattice structure along the sputtering surface should be 0.85 or more.
Career Highlights
Xiaoli Lu is currently employed at Ulvac, Inc., where she continues to develop innovative solutions in sputtering technology. Her expertise and dedication have positioned her as a key figure in her field.
Collaborations
Some of her notable coworkers include Junichi Nitta and Akira Nakamura, who collaborate with her on various projects within the company.
Conclusion
Xiaoli Lu's contributions to sputtering technology exemplify her commitment to innovation and efficiency. Her patent reflects her expertise and the potential impact of her work in the industry.