This inventor holds 3 USPTO granted patents and 1 published patent application. Top assignees: Lam Research Corporation, Novellus Systems Incorporated. Active years: 2012-2019.
Company Filing History:
Years Active: 2012-2019
Title: Innovations of Inventor Xiaolan Chen
Introduction
Xiaolan Chen is a notable inventor based in Tigard, Oregon. She has made significant contributions to the field of ultraviolet (UV) technology, holding a total of 3 patents. Her work focuses on advancements that enhance the efficiency and effectiveness of UV bulbs and semiconductor processing.
Latest Patents
One of her latest patents is for a high power low pressure UV bulb with a plasma resistant coating. This innovative design features an envelope made of UV transmissive material, which contains a UV emissive material and a plasma resistant coating applied via atomic layer deposition (ALD). The tube can be formed into a torus shape and is designed to operate under specific conditions, making it suitable for various applications, including curing films on semiconductor substrates and sterilizing fluids and objects. Another patent involves clean resistant windows for ultraviolet thermal processing, which includes methods for maintaining the cleanliness of semiconductor processing chambers. These windows are designed to be non-reactive with fluorine-containing chemistries, ensuring optimal performance in high-tech environments.
Career Highlights
Xiaolan Chen has worked with prominent companies in the semiconductor industry, including Lam Research Corporation and Novellus Systems Incorporated. Her experience in these organizations has allowed her to develop cutting-edge technologies that address critical challenges in semiconductor processing and UV applications.
Collaborations
Throughout her career, Xiaolan has collaborated with esteemed colleagues such as Eugene Smargiassi and James Forest Lee. These partnerships have contributed to her innovative work and the successful development of her patented technologies.
Conclusion
Xiaolan Chen's contributions to UV technology and semiconductor processing demonstrate her expertise and commitment to innovation. Her patents reflect a deep understanding of the challenges in these fields and offer solutions that enhance efficiency and effectiveness.