Xiaolan Chen

USPTO Granted Patents = 3 (Patent Applications = 1)

Average Co-Inventor Count = 5.5

ph-index = 3

Forward Citations = 29(Granted Patents)

Company Filing History:

2 out of 3,768

Lam Research Corporation

patents

1 out of 993

Novellus Systems Incorporated

patents

Years Active: 2012-2019

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3 patents (USPTO):Sort by Forward Citations

Abstract keywords

1. 10354857 - High power low pressure UV bulb with plasma resistant coating (2019-07-16),

2. 10240236 - Clean resistant windows for ultraviolet thermal processing (2019-03-26),

3. 8283644 - Measuring in-situ UV intensity in UV cure tool (2012-10-09),

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1 patent pending:

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