Xiantao Li

Title: Xiantao Li: Innovator in Semiconductor Manufacturing

Introduction

Xiantao Li is a prominent inventor based in Shanghai, China. He has made significant contributions to the field of semiconductor manufacturing, holding a total of 3 patents. His innovative methods have advanced the technology used in semiconductor devices, showcasing his expertise and dedication to the industry.

Latest Patents

Xiantao Li's latest patents include a method for manufacturing a semiconductor device. This method involves providing a substrate with an amorphous silicon layer formed on it. An etching auxiliary layer is then created on the amorphous silicon layer, ensuring a flat upper surface made of a single material. The process includes etching both the amorphous silicon layer and the etching auxiliary layer to achieve a target thickness, resulting in a flat upper surface on the etched amorphous silicon layer.

Another notable patent focuses on preventing over-polishing of the poly gate in metal-gate chemical mechanical polishing (CMP). This method includes providing a substrate containing a front-end device with a first gate in a first-type transistor region and a second gate in a second-type transistor region. An interlayer dielectric layer is formed on the semiconductor substrate, which is then planarized to expose the surfaces of both gates. A hard mask layer is applied to the second gate, allowing for the removal of the first gate and the formation of a trench. The process continues with the sequential formation of a work function metal layer and a metal gate layer in the trench, followed by the removal of excess material to create a metal gate.

Career Highlights

Xiantao Li has worked with notable companies in the semiconductor industry, including Semiconductor Manufacturing International Corporation and Shanghai Huali Integrated Circuit Corporation. His experience in these organizations has allowed him to refine his skills and contribute to groundbreaking advancements in semiconductor technology.

Collaborations

Throughout his career, Xiantao Li has collaborated with talented individuals such as Pulei Zhu and Li Jiang. These partnerships have fostered innovation and have been instrumental in the development of his patented methods.

Conclusion

Xiantao Li is a distinguished inventor whose work in semiconductor manufacturing has led to significant advancements in the field. His innovative patents and collaborations highlight his commitment to excellence and his impact on the industry.