Xavier Pages

Title: The Innovative Contributions of Xavier Pages

Introduction

Xavier Pages is a notable inventor based in Lovenjoel, Belgium. He has made significant contributions to the field of semiconductor technology, holding a total of 3 patents. His work focuses on methods that enhance the efficiency and effectiveness of semiconductor devices.

Latest Patents

One of Xavier's latest patents is titled "Methods of forming films in semiconductor devices with solid state reactants." This innovative method of self-aligned silicidation involves interrupting the silicidation process before the complete reaction of the blanket material, such as metal, occurs in regions directly overlying patterned and exposed materials like silicon. This technique prevents the diffusion of excess blanket material from over other regions, such as insulators. Control and uniformity are achieved through the use of conductive rapid thermal annealing in hot wall reactors, which feature massive heated plates closely spaced from the substrate surfaces. The interruption of the process is facilitated by forced cooling and conductive thermal exchange with these plates.

Another significant patent by Xavier is the "Method for the heat treatment of substrates." In this process, a substrate undergoes semiconductor fabrication at varying temperatures within a reactor without altering the reactor's temperature. The substrate is suspended by flowing gas between two heated surfaces of the reactor. By moving these heated surfaces close to the substrate for a specific duration, the substrate is heated to the desired temperature. This temperature is then maintained by distancing the heated surfaces from the substrate, minimizing further heating.

Career Highlights

Xavier Pages is currently employed at ASM International N.V., a company renowned for its advancements in semiconductor manufacturing equipment. His work at ASM International has allowed him to contribute to cutting-edge technologies that are pivotal in the semiconductor industry.

Collaborations

Xavier has collaborated with esteemed colleagues, including Vladimir Ivanovich Kuznetsov and Ernst H A Granneman. These partnerships have fostered an environment of innovation and have led to the development of groundbreaking technologies in semiconductor fabrication.

Conclusion

Xavier Pages is a distinguished inventor whose contributions to semiconductor technology have made a lasting impact. His innovative patents and collaborations highlight his commitment to advancing the field. His work continues to influence the future of semiconductor devices and their applications.