Woosung Han

Title: Woosung Han: Innovator in Wafer Processing Technologies

Introduction

Woosung Han is a prominent inventor based in Seoul, South Korea. He has made significant contributions to the field of semiconductor processing, holding a total of 3 patents. His innovative approaches have advanced the efficiency and effectiveness of wafer processing technologies.

Latest Patents

One of Han's latest patents is titled "Parallel multi wafer axial spin clean processing using spin cassette inside movable process chamber." This invention describes a system and method that concurrently processes multiple wafers. The cassette structure includes multiple chucks and a drive spool for supporting and rotating the chucks. Each chuck holds a wafer in position while rotating, and the cassette structure is loaded into a process chamber. A self-locking mechanism, activated by centrifugal force, centers and holds a wafer in position with respect to the chuck. A drive motor drives the drive spool, causing the chucks to rotate while a dispensing assembly delivers processing chemicals to the wafers.

Another notable patent is the "Apparatus and method for removing photoresist from a substrate." This invention outlines a method for removing photoresist by treating it with a first reactant to cause swelling, cracking, or delamination. The photoresist is then treated with a second reactant to chemically alter it, followed by the removal of the chemically altered photoresist with a third reactant. In one example, the first reactant is supercritical carbon dioxide (SCCO), the second is ozone vapor, and the third is deionized water.

Career Highlights

Woosung Han has worked with notable companies in the semiconductor industry, including Samsung Electronics Co., Ltd. and Samsung Austin Semiconductor, LP. His experience in these organizations has contributed to his expertise in wafer processing technologies.

Collaborations

Han has collaborated with talented individuals in his field, including coworkers Sangjun Choi and Sihyeung Lee. Their collective efforts have furthered advancements in semiconductor processing.

Conclusion

Woosung Han's innovative patents and career in the semiconductor industry highlight his significant contributions to wafer processing technologies. His work continues to influence advancements in this critical field.