Location History:
- Deajeon-si, KR (2009)
- Daejeon-si, KR (2012)
- Daejeon, KR (2014 - 2020)
Company Filing History:
Years Active: 2009-2020
Title: Woo Chan Kim: Innovator in Thin Film Deposition Technology
Introduction
Woo Chan Kim is a prominent inventor based in Daejeon, South Korea. He has made significant contributions to the field of semiconductor manufacturing, particularly in thin film deposition technology. With a total of nine patents to his name, Kim has established himself as a key figure in advancing innovative solutions in this area.
Latest Patents
Among his latest patents is a thin film deposition apparatus that features a reaction chamber. This apparatus includes a reactor wall, a susceptor that contacts the reactor wall to define a reaction space, and a gas flow control device. A showerhead member is stacked between the reactor wall and the susceptor, which includes a gas channel and a showerhead. Penetration holes are formed through a protruding lateral portion of the gas flow control device. The reactor wall and a lateral portion of the showerhead member are spaced apart to create a gas discharge path. This design allows for the rapid change of gases, enhancing the efficiency and productivity of atomic layer deposition processes.
Another notable patent involves a substrate holder and a semiconductor manufacturing apparatus that includes this holder. The substrate holder provides a reaction region by making face-sealing contact with the reactor wall. It exhibits elastic behavior when pressure is applied, ensuring a secure seal. The semiconductor manufacturing apparatus is equipped with a gas supply unit that delivers gas to the reaction region formed by the reactor wall and the substrate holder.
Career Highlights
Woo Chan Kim has worked with several notable companies, including ASM IP Holding B.V. and ASM Genitech Korea Ltd. His experience in these organizations has contributed to his expertise in semiconductor technologies and thin film deposition methods.
Collaborations
Throughout his career, Kim has collaborated with talented individuals such as Jeong Ho Lee and Hyun Soo Jang. These collaborations have likely fostered innovation and the development of advanced technologies in the semiconductor field.
Conclusion
Woo Chan Kim is a distinguished inventor whose work in thin film deposition technology has made a significant impact on the semiconductor industry. His innovative patents and collaborations highlight his commitment to advancing technology in this critical field.
Inventor’s Patent Attorneys refers to legal professionals with specialized expertise in representing inventors throughout the patent process. These attorneys assist inventors in navigating the complexities of patent law, including filing patent applications, conducting patent searches, and protecting intellectual property rights. They play a crucial role in helping inventors secure patents for their innovative creations.