Dresden, Germany

Wieland Pethe


Average Co-Inventor Count = 2.6

ph-index = 2

Forward Citations = 18(Granted Patents)


Company Filing History:


Years Active: 2016-2023

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4 patents (USPTO):

Title: The Innovative Mind of Wieland Pethe

Introduction

Wieland Pethe, an inventive engineer based in Dresden, Germany, has made significant contributions to the field of semiconductor processing. Holding a total of four patents, Pethe's work has revolutionized aspects of wafer processing systems, showcasing his prowess as a leading inventor in his field.

Latest Patents

Among his latest innovations is a groundbreaking patent for a semiconductor wafer processing system. This invention details methods and apparatuses designed for the efficient processing of semiconductor wafers. Key components of the system include a heating system for heating a chuck, a pressure control system for maintaining internal chamber pressure, and a gas flow system that ensures the correct inflow of gas to elevate internal chamber pressure to a designated base level. Notably, the heating system operates after the desired pressure is reached, optimizing the overall processing operation. Additionally, he has developed a system comprising a single wafer in a reduced volume process chamber, which includes a process chamber and a wafer chuck that facilitates wafer handling within the processing tool.

Career Highlights

Wieland Pethe has gained valuable experience through his tenure at prominent companies such as GlobalFoundries Inc. and SolarWorld Innovations GmbH. His work at these organizations has significantly influenced advancements in semiconductor technologies, establishing him as an expert in wafer processing techniques.

Collaborations

Throughout his career, Pethe has had the opportunity to collaborate with esteemed colleagues like Dirk Noack and Bernd Kallauch. These collaborations have fostered an environment of innovation and have contributed to the successful development of his patents.

Conclusion

Wieland Pethe exemplifies the spirit of innovation in the semiconductor industry. With his impressive portfolio of patents and collaborative efforts, he continues to influence the landscape of semiconductor wafer processing and inspire future inventors in the field. His commitment to innovation solidifies his place as a key contributor to technological advancements in this crucial sector.

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