Somers, NY, United States of America

Wendy Yan


Average Co-Inventor Count = 4.3

ph-index = 2

Forward Citations = 15(Granted Patents)


Company Filing History:


Years Active: 2001-2005

where 'Filed Patents' based on already Granted Patents

3 patents (USPTO):

Title: Innovator Spotlight: Wendy Yan

Introduction: Wendy Yan is a distinguished inventor based in Somers, NY, who has made significant contributions to the field of semiconductor manufacturing. With a total of three patents to her name, Wendy’s innovations reflect her expertise and commitment to advancing technology.

Latest Patents: Wendy’s recent patents focus on innovative methods that improve semiconductor fabrication processes. Her notable inventions include the "In-situ plasma etch for TERA hard mask materials," which presents a method for efficiently removing carbon from a TERA layer. This method involves exposing the TERA layer to a specially formulated plasma containing an effective amount of nitrogen, along with optional oxygen or fluorine, allowing it to function compatibly with fluorine-based etching systems. Additionally, she has patented a "Nitrogen-based highly polymerizing plasma process for etching of organic materials in semiconductor manufacturing." This method enables the etching of an organic antireflective film layer with minimal damage to the underlying oxide layer, utilizing a high-density plasma enriched with argon, fluorocarbon, and nitrogen.

Career Highlights: Wendy Yan works at the International Business Machines Corporation (IBM), a leading technology company renowned for its innovative products and solutions. Her role at IBM has allowed her to develop and refine her groundbreaking techniques, making her a valuable asset to her team.

Collaborations: Throughout her career, Wendy has collaborated with notable colleagues, including Richard Stephan Wise and Peter D Hoh. These partnerships have fostered an environment of shared knowledge and expertise, further enhancing the impact of her inventions in the industry.

Conclusion: Wendy Yan exemplifies the spirit of innovation in the semiconductor industry through her impressive patent portfolio and collaborations. Her work not only contributes to the technological advancements at IBM but also sets a precedent for future developments in semiconductor manufacturing. Wendy's contributions underscore the vital role of inventors in shaping the future of technology.

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