Wen-Zhan Zhou

Title: The Innovations of Wen-Zhan Zhou

Introduction

Wen-Zhan Zhou is a prominent inventor based in Singapore, known for his significant contributions to the field of semiconductor manufacturing. With a total of 4 patents to his name, Zhou has developed innovative methods that enhance the efficiency and accuracy of semiconductor production processes.

Latest Patents

One of his latest patents is a "Method for detecting semiconductor manufacturing conditions." This method involves providing a photomask with multiple pattern areas, each containing various test lines with different pitches. By exposing several wafers with this photomask under different manufacturing conditions and measuring the critical dimensions of the pattern areas, Zhou generates a library of relationships between the pitches and the critical dimensions. This library allows for the detection of manufacturing parameters used to expose a test wafer in an unknown condition.

Another notable patent is the "Reticle and optical proximity correction method." This method includes providing a primary mask with a primary pattern and forming an assist mask with a correction pattern that is substantially complementary to the primary pattern. By overlapping these masks, Zhou creates a reticle, where the light transmittance of the correction pattern is adjustable to equalize the light intensity distribution of the primary mask.

Career Highlights

Wen-Zhan Zhou has worked with several leading companies in the semiconductor industry, including United Microelectronics Corporation and Chartered Semiconductor Manufacturing Ltd. His experience in these organizations has allowed him to refine his skills and contribute to groundbreaking advancements in semiconductor technology.

Collaborations

Throughout his career, Zhou has collaborated with talented individuals such as Jin Yu and Kai-Hung Alex See. These partnerships have fostered an environment of innovation and creativity, leading to the development of impactful technologies in the semiconductor field.

Conclusion

Wen-Zhan Zhou's contributions to semiconductor manufacturing through his innovative patents and collaborations highlight his role as a key figure in the industry. His work continues to influence the future of semiconductor technology and manufacturing processes.