Singapore, Singapore

Wen Xiao

USPTO Granted Patents = 28 

Average Co-Inventor Count = 3.4

ph-index = 2

Forward Citations = 9(Granted Patents)


Company Filing History:


Years Active: 2021-2024

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28 patents (USPTO):

Title: The Innovative Mind of Wen Xiao in Singapore

Introduction

Wen Xiao is a prominent inventor based in Singapore, SG, with an impressive portfolio of 28 patents to his name. His innovations primarily focus on the field of extreme ultraviolet (EUV) technology, crucial for the advancement of semiconductor manufacturing and other high-tech applications.

Latest Patents

Wen Xiao's latest patents include groundbreaking developments in multilayer extreme ultraviolet reflector materials. These patents introduce advanced EUV mask blanks composed of a bilayer film on a substrate. The first film layer consists of silicon (Si), while the second incorporates elements such as ruthenium (Ru), nickel (Ni), cobalt (Co), tungsten (W), iron (Fe), titanium (Ti), and various silicides. Additionally, some EUV mask blanks feature a multilayer reflective stack with alternating layers, along with a capping layer for enhanced performance. Further advancements in his patents also allow for smoothing layers, utilizing materials like molybdenum silicide (MoSi), boron carbide (BC), and silicon nitride (SiN), which drastically improve reflectance.

Career Highlights

Wen Xiao has contributed significantly to the fields of materials science and technology through his work with reputable organizations. Notably, he has been associated with Applied Materials, Inc. and the Agency for Science, Technology and Research in Singapore. His expertise and innovations continue to shape the future of semiconductor technologies and reflective materials.

Collaborations

Throughout his career, Wen has collaborated with notable professionals such as Vibhu Jindal and Sanjay Krupakar Bhat. These collaborations have facilitated the sharing of knowledge and expertise, leading to significant advancements in the technologies he specializes in.

Conclusion

Wen Xiao’s contributions to the field of extreme ultraviolet technology encapsulate a blend of creativity and scientific rigor. With 28 patents to his name, his work not only reflects personal achievement but also signifies a crucial step forward for industries relying on advanced semiconductor technologies. His ongoing innovations promise to enhance efficiency and performance across various high-tech applications.

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