Company Filing History:
Years Active: 1999-2002
Title: Innovations of Wen Jun Liu
Introduction
Wen Jun Liu is a notable inventor based in Singapore, recognized for his contributions to the field of microelectronics. He holds a total of 3 patents, showcasing his expertise in advanced semiconductor manufacturing processes. His work has significantly impacted the efficiency and effectiveness of microelectronics fabrication.
Latest Patents
Wen Jun Liu's latest patents include a multiple-step plasma etching process for silicon nitride. This method involves a dry plasma selective etching technique that allows for precise patterning in a silicon nitride dielectric layer over a semiconductor substrate. The process consists of a four-step etching sequence, which includes a "break-through" etching step, a "bulk" etching step, and an "over-etch" step, ensuring control over critical dimensions while minimizing microloading and over-etching of underlying materials.
Another significant patent is the post metal etch photoresist strip method. This improved technique for removing a photoresist mask from an etched aluminum pattern utilizes a five-step process involving various microwave-generated plasmas. The method effectively removes photoresist residues while passivating the surface, ensuring a clean finish after etching aluminum or aluminum-copper layers in chlorine-bearing etchants.
Career Highlights
Wen Jun Liu has made substantial contributions to Chartered Semiconductor Manufacturing Ltd, where he applies his innovative techniques in semiconductor fabrication. His work has been instrumental in enhancing the manufacturing processes within the company, leading to improved product quality and efficiency.
Collaborations
Throughout his career, Wen Jun Liu has collaborated with talented individuals such as Mei Sheng Zhou and Pei Ching Lee. These partnerships have fostered a creative environment that encourages the development of cutting-edge technologies in the semiconductor industry.
Conclusion
Wen Jun Liu's innovative patents and contributions to semiconductor manufacturing highlight his role as a leading inventor in the field. His work continues to influence advancements in microelectronics, showcasing the importance of innovation in technology.