Wen-Haw Dai

Title: Innovations of Wen-Haw Dai in Microelectronics

Introduction

Wen-Haw Dai is a notable inventor based in Hsinchu County, Taiwan. She has made significant contributions to the field of microelectronics, particularly in the area of etching processes for silicon nitride-containing substrates. Her work has implications for the manufacturing of microelectronic devices, enhancing their efficiency and performance.

Latest Patents

Wen-Haw Dai holds a patent titled "Compositions and methods for etching silicon nitride-containing substrates." This patent describes compositions and methods that are useful for wet-etching a microelectronic device substrate that includes silicon nitride. The compositions include phosphoric acid, hexafluorosilicic acid, and an amino alkoxy silane, along with optional additional ingredients. The wet etching method she developed can achieve improved silicon nitride etch rates and selectivity, as well as a reduction in particles present at the substrate surface after etching.

Career Highlights

Wen-Haw Dai is currently employed at Entegris, Inc., a company known for its advanced materials and solutions for the semiconductor industry. Her work at Entegris has allowed her to apply her innovative ideas in a practical setting, contributing to the advancement of microelectronic technologies.

Collaborations

Wen-Haw Dai has collaborated with notable colleagues, including Emanuel Israel Cooper and Steven M Bilodeau. These collaborations have fostered a productive environment for innovation and have led to advancements in their respective fields.

Conclusion

Wen-Haw Dai's contributions to microelectronics through her patent and work at Entegris, Inc. highlight her role as an influential inventor in the industry. Her innovative methods for etching silicon nitride-containing substrates are paving the way for improved microelectronic device manufacturing.