Wei Sun

Title: Innovations of Wei Sun: A Pioneer in Electron Beam Technology

Introduction

Wei Sun is a notable inventor based in Tokyo, Japan, recognized for his contributions to the field of electron beam technology. With a total of seven patents to his name, he has made significant advancements that enhance the capabilities of electronic devices.

Latest Patents

Among his latest innovations is a pattern inspecting device. This device utilizes a reference waveform and a backscattered electron (BSE) signal waveform extracted from a backscattered electron image. It indicates the intensity of the backscattered electron signal from a pattern along a specific direction. The device generates a difference waveform that reveals the relationship between the backscattered electron signal intensity and the coordinates of the BSE signal waveform compared to the reference waveform. This technology allows for the determination of the presence or absence of a shielded region on the side wall of the pattern, which is not irradiated by a primary electron beam.

Another significant patent is an electronic microscope device. This invention features an electro-optical condition generation unit that includes a condition setting unit. This unit sets various electro-optical conditions by altering the combinations of aperture angle and focal-point height for an electron beam. Additionally, an index calculating unit determines a measurement-performance index based on these conditions, while a condition deriving unit ensures that the measurement-performance index meets a prescribed value.

Career Highlights

Wei Sun has worked with prominent companies such as Hitachi High-Tech Corporation and NEC Corporation. His experience in these organizations has allowed him to refine his skills and contribute to groundbreaking technologies in the field of electron microscopy.

Collaborations

Throughout his career, Wei Sun has collaborated with esteemed colleagues, including Yasunori Goto and Takuma Yamamoto. These partnerships have fostered innovation and have been instrumental in the development of his patented technologies.

Conclusion

Wei Sun's work exemplifies the spirit of innovation in the realm of electron beam technology. His patents not only advance the field but also pave the way for future developments in electronic devices.