Hitachi High-tech Corporation

Nec Corporation

Sony Corporation

Komatsu Corporation

The University of Tokyo

Wei Sun

Takuma Yamamoto

Yasunori Goto

Yasunari Sohda

Hiroyuki Ozawa

Makoto Sakakibara

Atsushi Yamashita

Taku Ninomiya

Kazuki Kure

Takashi Tsukamoto

Hideki Asazu

Yasushi Tsuruta

Toshiyuki Katsumoto

Mayuka Osaki

Junya Ohde

Hiromitsu Fujii

Takehisa Souraku

Takahiro Nishihata

Hajime Asama

From a reference waveformand a BSE signal waveformthat is extracted from a backscattered electron image and indicates a backscattered electron signal intensity from a pattern along a first direction, a difference waveform indicating a relationship between the backscattered electron signal intensity and a difference between a coordinate of the BSE signal waveform and a coordinate of the reference waveform which have the same backscattered electron signal intensity is generated, and presence or absence of a shielded regionthat is not irradiated with a primary electron beam on a side wall of the pattern is determined based on the difference waveform. The reference waveform indicates a backscattered electron signal intensity from a reference pattern along the first direction in which the side wall is formed perpendicularly to an upper surface and a bottom surface of the pattern when the reference pattern is scanned with the primary electron beam.

Pattern inspecting device

In the present invention, an electro-optical condition generation unit includes: a condition setting unit that sets, as a plurality of electro-optical conditions, a plurality of electro-optical conditions in which the combinations of the aperture angle and the focal-point height for an electron beam are different; an index calculating unit that determines a measurement-performance index in the electro-optical conditions set by the condition setting unit; and a condition deriving unit that derives an electro-optical condition, including an aperture angle and a focal-point height, so that the measurement-performance index determined by the index calculating unit becomes a prescribed value.

Electronic microscope device

A display system includes a work vehicle, a first camera, a computation device, and a display device. The first camera is attached to one side portion of the work vehicle. The first camera has an optical axis inclined downward with respect to a horizontal direction. The first camera captures a first image including a surrounding environment of the work vehicle and a first vehicle body portion. The computation device generates a display image from the first image. The display image includes a surrounding image that depicts the surrounding environment of the work vehicle in a bird's-eye view, and a vehicle image. The vehicle image may combine a vehicle model depicted in the work vehicle and an image of the first vehicle body portion captured by the first camera, or may be an image of the first vehicle body portion. The display device displays the display image.

Display system for work vehicle

A pattern measuring device ensures highly accurately measuring a depth and a three-dimensional shape irrespective of a formation accuracy of a deep trench and/or a deep hole. Therefore, in the present invention, the measuring system detects backscattered electrons from a pattern caused by an irradiation, compares backscattered electron signal intensities from a top surface, a bottom surface, and a sidewall of the pattern, and calculates a three-dimensional shape (or height information) of the sidewall based on a difference in heights of the top surface and the lower surface. The measuring system compares the calculated three-dimensional shape of the sidewall with a three-dimensional shape of the sidewall estimated based on an intensity distribution (open angle) of a primary electron beam, corrects the estimated three-dimensional shape of the sidewall based on a difference in the comparison, and corrects until the difference in the comparison becomes an acceptable value.

System and method for measuring patterns

A multiprocessor system comprises: a plurality of processors; a counting, measuring and calculating (CMC) unit that determines a generating rate of sleep tasks and a time length of each of the sleep tasks based on an acceptable delay; a sleep task generator that generates the sleep tasks with the time length at the generating rate, and injects the generated sleep tasks into a traffic for original tasks; and a scheduler that assigns both the original tasks and the sleep tasks in the traffic to the plurality of processors, wherein each of the sleep tasks switches off one of the plurality of processors, on which the sleep task is assigned.

Multiprocessor system and method of saving energy therein

A distributed system includes: nodes each having a memory, running distributed processes, and checkpointing to create checkpoint data for each process; a selection unit selecting spare nodes for future failure recovery for each process; an allocation unit allocating and transmitting the checkpoint data to the spare nodes to make the spare nodes store the checkpoint data before failure; and a recovery unit selecting one checkpoint data for recovery, activates the selected checkpoint data to run a process on the spare node, or partitions the existing stored checkpoint data, when any checkpoint data is not suitable for recovery, the partitions of the checkpoint data as a whole being integrated into a complete checkpoint data; and transmitting the partitions from the spare nodes to a new node, and reorganizing the partitions into complete data to be activated to run a process on the new node.

Method, distributed system and computer program for failure recovery

A recording control apparatus for controlling the recording of content of broadcast programs includes the following elements. An acquisition unit acquires electronic program guide data concerning the broadcast programs. A detector detects the title of a broadcast program from reserve-recording data indicating a recording reservation of the broadcast program. A calculator calculates the similarity between the title of the broadcast program detected by the detector and the title of the broadcast program indicated in the electronic program guide data acquired by the acquisition unit. A changing unit changes the reserve-recording data by using the electronic program guide data on the basis of the similarity calculated by the calculator.

Recording control apparatus and method, and program

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Tokyo, Japan

Wei Sun