This inventor holds 1 USPTO granted patent and 2 published patent applications. Top assignee: Entegris, Inc.. Active years: 2024.
Company Filing History:
Years Active: 2024
Title: Innovations of Wei-Ling Lan in Selective Etching Technologies
Introduction
Wei-Ling Lan is a notable inventor based in Hsinchu, Taiwan. He has made significant contributions to the field of semiconductor manufacturing, particularly in the area of selective etching technologies. His work focuses on improving the efficiency and effectiveness of etching processes, which are crucial in the production of electronic components.
Latest Patents
Wei-Ling Lan holds a patent for "Selective etchant compositions and methods." This invention relates to compositions and methods for selectively etching silicon nitride in the presence of silicon oxide, polysilicon, and/or metal silicides at a high etch rate and with high selectivity. The patent describes various additives that can be used at different dissolved silica loading windows to maintain the high selective etch rate and selectivity.
Career Highlights
Wei-Ling Lan is currently employed at Entegris, Inc., a company known for its advanced materials and solutions for the semiconductor industry. His work at Entegris has allowed him to further develop his innovative ideas and contribute to the company's success in the market.
Collaborations
Wei-Ling Lan has collaborated with several talented individuals in his field, including Hsing-Chen Wu and Min-Chieh Yang. These collaborations have fostered a creative environment that encourages the exchange of ideas and advancements in technology.
Conclusion
Wei-Ling Lan's contributions to selective etching technologies demonstrate his commitment to innovation in the semiconductor industry. His patent and collaborative efforts highlight the importance of teamwork in driving technological advancements.