Wei Feng Qu

Title: Innovations of Wei Feng Qu in Silicon Single Crystal Wafer Manufacturing

Introduction

Wei Feng Qu is a prominent inventor based in Annaka, Japan, known for his significant contributions to the field of semiconductor technology. He holds a total of 7 patents, showcasing his expertise and innovative spirit in the manufacturing of silicon single crystal wafers.

Latest Patents

Among his latest patents, Wei Feng Qu has developed a method for manufacturing silicon single crystal wafers. This method involves using a silicon single crystal wafer with an oxygen concentration of 12 ppma (JEITA) or higher, composing an N-region, and performing an RTA treatment in a nitrogen-containing atmosphere at temperatures of 1225° C. or higher. The process includes mirror-polish processing treatment and BMD-forming heat treatment, resulting in a silicon single crystal wafer that features at least a DZ layer with a thickness of 5 to 12.5 μm and a BMD layer positioned immediately below the DZ layer. This innovation enhances the strength of the device formation region and suppresses surface layer dislocation occurrences.

Another notable patent by Qu is a method for heat-treating silicon single crystal wafers. This method aims to control the BMD density to achieve a predetermined level by performing an RTA heat treatment in a nitriding atmosphere, followed by a second heat treatment. The process includes formulating a relational equation to determine the RTA temperature necessary for achieving the desired BMD density, ultimately leading to the production of defect-free annealed or epitaxial wafers.

Career Highlights

Wei Feng Qu is currently employed at Shin-Etsu Handotai Co., Ltd., where he continues to push the boundaries of innovation in semiconductor manufacturing. His work has significantly impacted the industry, particularly in enhancing the quality and performance of silicon wafers.

Collaborations

Throughout his career, Wei Feng Qu has collaborated with notable colleagues, including Fumio Tahara and Yuuki Ooi. These partnerships have fostered a collaborative environment that encourages the exchange of ideas and advancements in technology.

Conclusion

Wei Feng Qu's contributions to the field of silicon single crystal wafer manufacturing exemplify his innovative mindset and dedication to advancing semiconductor technology. His patents reflect a deep understanding of material science and engineering, positioning him as a key figure in the industry.