Company Filing History:
Years Active: 2022
Title: Innovations by Wee Teck Tan
Introduction
Wee Teck Tan is a notable inventor based in Singapore, recognized for his contributions to substrate processing technology. His innovative approach has led to the development of a unique substrate processing method that enhances efficiency in semiconductor manufacturing.
Latest Patents
Wee Teck Tan holds a patent for a substrate processing method and apparatus. This patent outlines a process performed in a chamber that includes a substrate support, an upper electrode, and a gas supply port. The method involves several steps, including providing the substrate on the support, supplying a first processing gas, and generating plasma through a combination of RF and negative DC voltage signals. The process is designed to be efficient, with a time frame for certain steps being 30 seconds or shorter.
Career Highlights
Wee Teck Tan is currently associated with Tokyo Electron Limited, a leading company in the semiconductor industry. His work focuses on advancing substrate processing techniques, which are crucial for the production of high-quality semiconductor devices.
Collaborations
Throughout his career, Wee Teck Tan has collaborated with esteemed colleagues such as Seiichi Watanabe and Kazuki Narishige. These collaborations have contributed to the advancement of technology in the field of substrate processing.
Conclusion
Wee Teck Tan's innovative contributions to substrate processing methods have made a significant impact in the semiconductor industry. His work continues to influence advancements in technology and manufacturing processes.