Wayne Mattingly

Title: Wayne Mattingly: Innovator in Polishing Control Methods

Introduction

Wayne Mattingly is a notable inventor based in Canyon Country, CA (US). He has made significant contributions to the field of semiconductor manufacturing through his innovative polishing control methods. His work focuses on enhancing the efficiency and effectiveness of wafer polishing processes.

Latest Patents

Wayne Mattingly holds a patent for a polishing control method. This method involves the polishing of wafers, such as those made from semiconductive material, by mounting the wafer to a carrier and pressing it against a polishing pad that carries polishing media. An antenna is placed beneath the polishing pad, and electrical energization is applied between the carrier assembly and the antenna. The electrical energization includes a direct current bias and may also incorporate a radio frequency carrier injection signal. The method allows for real-time monitoring of noise associated with ionic disassociation to assess ongoing polishing activity.

Career Highlights

Wayne Mattingly is currently associated with Speedfam Corporation, where he continues to develop and refine his innovative techniques in wafer polishing. His expertise in this area has positioned him as a valuable asset to the company and the semiconductor industry.

Collaborations

Wayne collaborates with Hatsuyuki Arai, contributing to advancements in polishing technologies and methodologies.

Conclusion

Wayne Mattingly's contributions to polishing control methods have made a significant impact on the semiconductor industry. His innovative approach continues to enhance the efficiency of wafer polishing processes, showcasing his dedication to advancing technology.