Company Filing History:
Years Active: 2002-2013
Title: The Innovative Contributions of Vladimir Volovich
Introduction
Vladimir Volovich is a notable inventor based in Mountain View, CA, who has made significant contributions to the field of semiconductor technology. With a total of 4 patents to his name, he has developed innovative solutions that enhance the efficiency and effectiveness of wafer polishing processes.
Latest Patents
Among his latest patents is the "Wafer Polishing Apparatus and Method." This invention features a rotatable turntable designed to hold a polishing pad, along with at least one rotatable polishing head that can be attached to a wafer alignment assembly. The wafer alignment assembly consists of an upper plate and a lower plate connected by three lever assemblies, which are symmetrically positioned around the axis of rotation. Each lever assembly includes a spherical joint, an elongated cylindrical hinge, and a kinematic axis that intersects the center of rotation for the spherical hinge. This design allows for precise adjustments during the polishing process.
Another significant patent is the "Semiconductor Wafer Polishing Machine." This machine is specifically adapted for polishing large silicon wafers. It comprises a rotatable platen mounted on a table base, with a lid that houses a head moving assembly featuring four synchronously rotatable head assemblies. The machine's design enables complex relative motion between the wafer surface and the platen, resulting in improved uniformity and polishing rates compared to existing wafer polishing machines.
Career Highlights
Vladimir Volovich has worked with various companies throughout his career, including TSK America. His expertise in semiconductor technology has allowed him to contribute to advancements in wafer polishing techniques, making him a respected figure in the industry.
Collaborations
Throughout his career, Volovich has collaborated with notable individuals such as Edmond Arzumau Abrahamians and Edmond Arzuman Abrahamians. These collaborations have further enriched his work and contributed to the development of innovative technologies in the semiconductor field.
Conclusion
Vladimir Volovich's contributions to the semiconductor industry through his patents and innovative designs have significantly impacted wafer polishing technology. His work continues to influence advancements in the field, showcasing the importance of innovation in driving progress.