Vladimir Tumakov

Title: Vladimir Tumakov: Innovator in Semiconductor Inspection Technologies

Introduction

Vladimir Tumakov is a notable inventor based in Milpitas, CA, specializing in technologies related to semiconductor inspection. With a total of 2 patents to his name, Tumakov has made significant contributions to the field, particularly in the areas of noise analysis and image processing.

Latest Patents

One of Tumakov's latest patents is titled "Clustering sub-care areas based on noise characteristics." This invention involves determining a care area in an image of a semiconductor wafer, which is then divided into sub-care areas based on the shapes of polygons in a design file. A noise scan of a histogram for these sub-care areas is performed, allowing for the clustering of the sub-care areas into groups based on the noise characteristics identified.

Another significant patent is the "System and method for inspection using tensor decomposition and singular value decomposition." This invention describes a sample characterization system that includes a controller connected to an inspection sub-system. The system is designed to acquire target image frames of a sample, generate a target tensor, and perform decomposition processes to identify differences between target and reference image frames. This process ultimately helps in determining the characteristics of the sample based on the identified differences.

Career Highlights

Vladimir Tumakov is currently employed at Kla Corporation, a company known for its advanced semiconductor inspection and metrology solutions. His work at Kla Corporation has positioned him as a key player in the development of innovative technologies that enhance the efficiency and accuracy of semiconductor manufacturing processes.

Collaborations

Throughout his career, Tumakov has collaborated with talented individuals such as Bjorn Brauer and Boshi Huang. These collaborations have contributed to the advancement of technologies in the semiconductor industry.

Conclusion

Vladimir Tumakov's contributions to semiconductor inspection technologies through his patents and work at Kla Corporation highlight his role as an influential inventor in the field. His innovative approaches continue to shape the future of semiconductor manufacturing.