Location History:
- Campbell, CA (US) (2006 - 2023)
- Santa Clara, CA (US) (2024)
Company Filing History:
Years Active: 2006-2025
Title: Vladimir Galburt: Innovator in Polishing Technology
Introduction
Vladimir Galburt is a notable inventor based in Campbell, California, recognized for his contributions to polishing technology. With a total of nine patents to his name, he has made significant advancements in the field, particularly in the design and functionality of polishing systems.
Latest Patents
One of Galburt's latest patents is a polishing head with local wafer pressure. This innovative polishing system features a carriage arm equipped with an actuator on its lower surface. The actuator consists of a piston and a roller at the distal end, which works in conjunction with a polishing pad and a substrate carrier. The substrate carrier is designed to apply pressure between the substrate and the polishing pad, enhancing the efficiency of the polishing process. It includes a housing, a retaining ring, and a membrane, along with an upper load ring that interacts with the roller during relative rotation. The actuator's ability to apply a load to the upper load ring allows for precise control over the pressure applied, resulting in improved polishing outcomes.
Career Highlights
Throughout his career, Vladimir Galburt has worked with prominent companies in the technology sector. He has been associated with Applied Materials, Inc. and Alta Devices, Inc., where he has contributed to various innovative projects and developments in the field of materials processing and energy solutions.
Collaborations
Galburt has collaborated with several professionals in his field, including Michael N. Sugarman and Andrew J. Nagengast. These collaborations have further enriched his work and have led to advancements in polishing technologies.
Conclusion
Vladimir Galburt's innovative work in polishing technology has made a significant impact on the industry. His patents reflect a commitment to enhancing the efficiency and effectiveness of polishing systems. His contributions continue to influence the field and inspire future innovations.
Inventor’s Patent Attorneys refers to legal professionals with specialized expertise in representing inventors throughout the patent process. These attorneys assist inventors in navigating the complexities of patent law, including filing patent applications, conducting patent searches, and protecting intellectual property rights. They play a crucial role in helping inventors secure patents for their innovative creations.