Company Filing History:
Years Active: 2002-2008
Title: Innovations of Vladimir A Kulgeyko
Introduction
Vladimir A Kulgeyko is a prominent inventor based in San Diego, CA, known for his contributions to laser technology. He holds a total of 4 patents, showcasing his expertise in developing advanced laser systems.
Latest Patents
One of his latest patents is a line narrowing module designed for a narrow band DUV high power high repetition rate gas discharge laser. This invention includes a method and module that produce output laser light pulse beam pulses in bursts. The module features a dispersive center wavelength selection optic that is moveably mounted within the optical path, allowing for precise selection of the center wavelength for each pulse. Additionally, it incorporates two tuning mechanisms that adjust the angle of incidence of the laser light pulse beam, ensuring optimal performance. Another significant patent is for a four KHz gas discharge laser, which is capable of producing a high-quality pulsed laser beam at pulse rates of about 4,000 Hz. This excimer laser is specifically designed as a light source for integrated circuit lithography, demonstrating its importance in the semiconductor industry.
Career Highlights
Vladimir A Kulgeyko is currently employed at Cymer, Inc., a company renowned for its cutting-edge laser technology. His work has significantly impacted the field of photolithography, contributing to advancements in integrated circuit manufacturing.
Collaborations
Throughout his career, Kulgeyko has collaborated with notable colleagues, including William N Partlo and Richard L Sandstrom. These partnerships have fostered innovation and development in laser technology.
Conclusion
Vladimir A Kulgeyko's contributions to laser technology through his patents and work at Cymer, Inc. highlight his role as a leading inventor in the field. His innovations continue to influence advancements in various applications, particularly in integrated circuit lithography.