Vivian Liu

Title: Innovations by Inventor Vivian Liu

Introduction

Vivian Liu is a notable inventor based in Garland, TX (US). She has made significant contributions to the field of semiconductor technology, holding 2 patents that showcase her innovative approach to solving complex engineering challenges.

Latest Patents

One of her latest patents is titled "Process method to facilitate silicidation." This invention focuses on removing dry etch residue from a dry plasma etch process before depositing a cobalt layer on silicon substrate and/or polysilicon material. The process includes one or more annealing steps that enable cobalt to react with silicon, forming cobalt silicide regions. By eliminating dry etch residue, the invention ensures that the cobalt silicide regions are formed uniformly, achieving the desired silicide sheet and contact resistance. The method involves a first cleaning operation followed by an extended cleaning operation using a suitable cleaning solution, which effectively removes the remaining dry etch residue.

Another significant patent by Liu is the "Multi-layer reducible sidewall process." This invention pertains to a multi-layer sidewall process that facilitates the formation of transistors while adhering to specific design rules. The process involves creating first sidewall spacers alongside a gate structure to implant source/drain dopants at a safe distance from the gate, preventing dopant migration into the channel area. The invention also simplifies the salicide blocking process and allows for the formation of smaller second sidewall spacers, enabling compliance with design rules by positioning source and drain contacts closer to the gate structure.

Career Highlights

Vivian Liu is currently employed at Texas Instruments Corporation, where she continues to innovate and contribute to advancements in semiconductor technology. Her work has had a significant impact on the efficiency and performance of electronic devices.

Collaborations

Throughout her career, Liu has collaborated with esteemed colleagues, including Freidoon Mehrad and Amitava Chatterjee. These collaborations have further enriched her work and contributed to the success of her inventions.

Conclusion

Vivian Liu's contributions to semiconductor technology through her innovative patents demonstrate her expertise and commitment to advancing the field. Her work continues to influence the design and functionality of modern electronic devices.