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Phoenix, AZ, United States of America

Vishwas V Hardikar

USPTO Granted Patents = 8

Average Co-Inventor Count = 1.3

ph-index = 4

Forward Citations = 48(Granted Patents)

Location History:

Phoenix, AZ (US) (2005 - 2008)
Tempe, AZ (US) (2008)
Campbell, CA (US) (2012)

Company Filing History:

Novellus Systems Incorporated

Years Active: 2005-2012

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8 patents (USPTO):Sort by Forward CitationsExplore Patents

1. 8261758 - Apparatus and method for cleaning and removing liquids from front and back sides of a rotating workpiece (2012-09-11),

2. 7468322 - Methods of multi-step electrochemical mechanical planarization of Cu (2008-12-23),

3. 7422700 - Compositions and methods of electrochemical removal of material from a barrier layer of a wafer (2008-09-09),

4. 7335288 - Methods for depositing copper on a noble metal layer of a work piece (2008-02-26),

5. 7195548 - Method and apparatus for post-CMP cleaning of a semiconductor work piece (2007-03-27),

6. 7182673 - Method and apparatus for post-CMP cleaning of a semiconductor work piece (2007-02-27),

7. 7105082 - Composition and method for electrodeposition of metal on a work piece (2006-09-12),

8. 6869336 - Methods and compositions for chemical mechanical planarization of ruthenium (2005-03-22),

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